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日本理音RION KS-41B液體粒子計(jì)數(shù)器

日本理音RION KS-41B液體粒子計(jì)數(shù)器

簡(jiǎn)要描述:日本理音RION KS-41B液體粒子計(jì)數(shù)器
Measures 0.1µm Particles in Photoresist, SOG and other solutions
0.07µm as Option(For measuring clear solutions such as UPW)

產(chǎn)品型號(hào): KS-41B

所屬分類:塵埃粒子計(jì)數(shù)器

更新時(shí)間:2024-08-14

詳細(xì)說(shuō)明:

日本理音RION KS-41B液體粒子計(jì)數(shù)器   產(chǎn)地:日本

Measures 0.1µm Particles in Photoresist, SOG and other solutions 
0.07µm as Option(For measuring clear solutions such as UPW) 

< Specification >

 

Optical systemLight-scattering method
Light sourceDiode pumped solid state laser (wavelength 532 nm, rated output 500 mW)
Materials of parts exposed to sampleSynthetic quartz, PFA
Size range1 to 10 channels (Setting range 0.1µm to 0.5µm)
Sample flow rate5 mL/min
Counting efficiency50±10 %
Maximum particle number concentration48 000 particles/mL (at 10 % coincidence loss for 0.1µm particles)
PowerDC12 V (supplied by KE-40B1)
Dimensions and weight164 (H) x 464 (W) x 320 (D) mm (excluding protruding parts), Approx. 12.5 kg


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